Development of La3+ Doped CeO2 Thick Film Humidity Sensors

Abstract

The humidity sensitive characteristics of the sensor fabricated from 10 mol% La₂O₃ doped CeO₂ nanopowders with particle size 17.26 nm synthesized via hydrothermal method were investigated at different frequencies. It was found that the sensor shows high humidity sensitivity, rapid response-recovery characteristics, and narrow hysteresis loop at 100 Hz in the relative humidity range from 11% to 95%. The impedance of the sensor decreases by about five orders of magnitude as relative humidity increases. The maximum humidity hysteresis is about 6% RH, and the response and recovery time is 12 and 13 s, respectively. These results indicate that the nanosized La₂O₃ doped CeO₂ powder has potential application as high-performance humidity sensor.